Ultra Pure Water Management in Semiconductor Manufacturing
Discover expert insights on ultra pure water reuse and quality control in semiconductor fabs. AZoMaterials speaks with METTLER TOLEDO about the critical role of ultra-pure water management.
Ultra-pure water (UPW), also known as deionized (DI) water, is essential to nearly every process in a semiconductor fab, including etching, cleaning, and chemical mechanical planarization (CMP).
- Pretreatment of raw water
- Pollishing to UPW-grade quality
- Distribution to process tools
- Assessment for reuse or discharge
The semiconductor industry is the world’s largest consumer of UPW, with a major focus on reducing water consumption, guided by industry efforts like the FO-98 committee.
Image Credit: Gorodenkoff/Shutterstock
Author summary: Expert insights on ultra pure water management.
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